The purpose of this Document is to provide specifications
for phosphine (PH3) that are used in the semiconductor industry.
This Document covers requirements for phosphine used in the
semiconductor industry.
Referenced SEMI Standards (purchase separately)
SEMI C3 — Specification for Gases
Revision History
SEMI C3.6-0421 (technical revision)
SEMI C3.6-0710 (Reapproved 0815)
SEMI C3.6-0710 (technical revision)
SEMI C3.6-0701 (technical revision)
SEMI C3.6-95 (technical revision)
SEMI C3.6-93 (technical revision)
SEMI C3.6-81 (first published)
