C00318 - SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality : Standards semi.org : Standards|Women|Men|Denim & Pants|Skin

C00318 - SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality

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C00318 - SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality

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Model: 2711
Tags: Lang-English StdDcs-Replaced StdTier-Tier0 StdTpc-Gases - Process StdVol-Gases

Revision:

SEMI C3.18-1102 - Replaced

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Description: NOTICE: This document was replaced by SEMI C56 in 2005.

The purpose of this document is to provide a specification for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. This document covers requirements for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline.
　
Referenced SEMI Standards
None.
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