This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in January 2018; originally published in 1984; previously published October 2011.

The purpose of this Document is to provide a specification for boron trifluoride (BF₃) used in the semiconductor industry.

This Document covers requirements for boron trifluoride (BF₃) used in the semiconductor industry.

If analytical methods are not complete, the requirements are presented as a guideline.

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C3 — Specification for Gases