The purpose of this Document is to provide specification
for hydrogen chloride (HCl) that is used in the semiconductor industry.
This Document covers requirements for hydrogen chloride
used in the semiconductor industry.
Referenced SEMI Standards (purchase separately)
None.
Revision History
SEMI C3.35-0421 (technical revision)
SEMI C3.35-1109E (Reapproved 0815)
SEMI C3.35-1109E (editorial revision)
SEMI C3.35-1109 (technical revision)
SEMI C3.35-1101 (technical revision)
SEMI C3.35-95 (technical revision)
SEMI C3.35-94 (technical revision)
SEMI C3.35-92 (technical revision)
SEMI C3.35-89 (technical revision)
SEMI C3.35-88 (first published)
