C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality : Standards semi.org : Standards|Women|Men|Denim & Pants|Skin

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C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality

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Tags: Lang-English StdDcs-Current StdPbc-0920 StdTier-Tier0 StdTpc-Gases - Process StdVol-Gases

Revision:

SEMI C3.37-0920 - CurrentSEMI C3.37-0819 - SupersededSEMI C3.37-0614 - SupersededSEMI C3.37-1109 - SupersededSEMI C3.37-0701 - SupersededSEMI C3.37-93 - SupersededSEMI C3.37-92 - SupersededSEMI C3.37-89 - Superseded

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Description: The purpose of this Document is to provide specification for hexafluoroethane (C₂F₆) that is used in the semiconductor industry.

　

This Document covers requirements for hexafluoroethane used in the semiconductor industry.

　
Referenced SEMI Standards
None.
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C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality

Price: $0.19 0

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