This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1995; previously published November 2011.

NOTICE: This Document was balloted and approved for withdrawal in 2012; it has been replaced by SEMI C71.

To define the specification and analytical methods and validate the specifications for BCl₃.

This Specification relates to a geometry of 0.5 µ or less (0.35 to 0.5 range) and describes analytical techniques using gas phase analysis.

None.