C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality : Standards semi.org : Standards|Women|Men|Denim & Pants|Skin

C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality

Revision:

SEMI C3.58-1011 (Reapproved 0418) - CurrentSEMI C3.58-1011 - SupersededSEMI C3.58-0303 - SupersededSEMI C3.58-0600 - Superseded

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Description: This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www.semiviews.org and www.semi.org in April 2018; originally published June 2000; previously published October 2011.

　

The purpose of this Document is to provide specification for octafluorocyclobutane (C₄F₈), that is used in the semiconductor industry.

This Document covers requirements for octafluorocyclobutane (C₄F₈) used in the semiconductor industry.

　
Referenced SEMI Standards
None.
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