NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

The purpose of this Standard is to define a comprehensive standard test sequence to derive particle-related qualification data for 25 cm (10 in.) filter cartridges.

This Test Method defines a particle shedding evaluation method for 25 cm filter cartridges of various media (e.g., PTFE, PVDF, polycarbonate, nylon, and polysulfone) commonly used individually or in assemblies to remove particles from gas lines. The filter cartridges are separable from the housings which can be cleaned and tested independently.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI C14-95 (Reapproved 0309)

SEMI C14-95 (Reapproved 1102)

SEMI C14-95 (first published)