The purpose of this Document is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
The scope of this Document is all grades of acetone used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide
for the Analysis of Liquid Chemicals
SEMI C27 —
Specification and Guide for Hydrochloric Acid
SEMI C35 —
Specification and Guide for Nitric Acid
SEMI C44 —
Specification and Guide for Sulfuric Acid
