NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

The purpose of this Specification is to standardize requirements for n-butyl acetate used in the semiconductor industry and to document testing procedures to support those specifications. Test methods have been shown to give statistically valid results.

The scope of this Specification is for one grade of n-butyl acetate used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History

SEMI C24-0813 (technical revision)

SEMI C24-0301 (technical revision)

SEMI C24-0699 (first published)