This Standard was technically approved by the global Liquid Chemicals Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2012. Available at www.semiviews.org and www.semi.org in February 2019; originally published in 1981; previously published March 2006.
The purpose of this Document is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
The scope of this Document is for grades of mixed acid etchants used in the semiconductor industry.
Referenced SEMI Standards SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C2 — Specifications for Etchants
