This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in January 2018; originally published in 1979; previously published July 2008.

The purpose of this Document is to standardize requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods can be used as long as method validation per SEMI C1 has been demonstrated. This Document also provides a guide for a grade of nitric acid for which a need has been identified. In the case of this Guide, the test methods may not have been statistically validated yet.

The scope of this Document is grades of nitric acid used in the semiconductor industry.

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specification and Guide for Hydrochloric Acid
SEMI C44 — Specification and Guide for Sulfuric Acid