The purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

The scope of this Specification is for grades of phosphoric acid used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

SEMI C35 — Specification and Guide for Nitric Acid

Revision History

SEMI C36-1121 (technical revision)

SEMI C36-1213 (technical revision)

SEMI C36-1107 (technical revision)

SEMI C36-1106 (technical revision)

SEMI C36-0705 (technical revision)

SEMI C36-0301 (technical revision)

SEMI C36-0200 (technical revision)

SEMI C36-0699 (first published - replaces SEMI C1.13-96, SEMI C1.27-96, SEMI C7.24-0697, and SEMI C8.10-93)