This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at www.semi.org in November 2010; originally published in 1995; previously published November 2005.

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

The purpose of this Document is to standardize requirements for trimethylphosphite used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

The scope of this Document covers a grade of trimethylphosphite used in the semiconductor industry.

SEMI C1 — Guide for the Analysis of Liquid Chemicals