1  Purpose
1.1  This Standard provides a series of specifications for different grades of oxygen (O2) that are used in the semiconductor industry.
 

2  Scope
2.1  This Specification covers requirements for all standard grades of oxygen used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C3 — Specification for Gases
SEMI C3.22 — Standard for Oxygen (O2), 99.5% Quality
SEMI C3.23 — Standard for Oxygen (O2), 99.98% Quality
SEMI C3.41 — Standard for Oxygen (O2), Bulk, 99.9998% Quality

Revision History
SEMI C54-0624 (technical revision)
SEMI C54-1116 (technical revision)
SEMI C54-1103 (Reapproved 0211)
SEMI C54-1103 (first published)