This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in January 2018; originally published November 2004; previously published February 2011.

The purpose of this Document is to provide a specification for liquid carbon dioxide (CO₂) that is used in near critical, critical and supercritical applications in the semiconductor industry.

This Document provides purity requirements for all grades of liquid carbon dioxide that are used in near critical, critical and supercritical applications in the semiconductor industry.

If analytical methods are not complete, the requirements are presented as a guideline.

SEMI C10 — Guide for Determination of Method Detection Limits
SEMI C15 — Test Method for ppm and ppb Humidity Standards
SEMI F33 — Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)