C08400 - SEMI C84 - Guide for Cyclopentanone

C08400 - SEMI C84 - Guide for Cyclopentanone

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Revision:
SEMI C84-0214 (Reapproved 1119) - CurrentSEMI C84-0214 - Superseded

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Description

The purpose of this Document is to provide a guide for cyclopentanone for which a need has been identified.

 

The scope of this Document covers cyclopentanone which is used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals



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