This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. Available at www.semiviews.org and www.semi.org in July 2006; originally published February 2000.

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard specifies selected geometrical requirements of glass substrates used to manufacture flat panel displays.

This Standard is intended to set levels of specification for glass substrates to insure repeatable manufacture of flat panel displays and uniformity of substrates from all vendors. This Standard will also insure interchangeability at all mechanical interfaces within process tools as well as with transportation and automation cassettes.