This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007.
This standard defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.
Referenced SEMI Standards SEMI D9 — Terminology for FPD Substrates
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays
SEMI D32 — Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner Unification
SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool
