NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
This Standard is intended to unify the interface between
process/inspection tools and automated wafer carrier transport systems while
maintaining compatibility with human transport.
This Specification deals with the mechanical interface
(load port) for wafer carrier transfer between wafer carrier material transport
systems, including humans, and wafer fabrication/inspection equipment (tools).
The concept defines the placement and orientation of a wafer carrier on a tool
to allow reasonable interfacing with mechanized material movement systems
without compromising human access to perform the material exchange function.
Referenced SEMI Standards (purchase separately)
SEMI E1 — Specification for Open Plastic and Metal Wafer
Carriers
SEMI E19 — Standard Mechanical Interface (SMIF)
Revision History
SEMI E15-0698E2 (Reapproved 1016)
SEMI E15-0698E2 (Reapproved 0310)
SEMI E15-0698E2 (Reapproved 0703)
SEMI E15-0698E (Reapproved 0703)
SEMI E15-0698E (editorial revision)
SEMI E15-0698 (technical revision)
SEMI E15-96 (technical revision)
SEMI E15-95 (technical revision)
SEMI E15-90 (first published)
