This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard-compliant Sensor/Actuator devices.

This Standard specifies how devices interoperate on a network as part of the control system for equipment.

This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components of the SEMI SAN Standard.

Subordinate Standards (included)
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.2 — Guide for Writing Sensor/Actuator Network (SAN) Letter Ballots

Referenced SEMI Standards (purchase separately)
SEMI E30 — Specification for Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model

Revision History
SEMI E54-0316 (Reapproved 0124)
SEMI E54-0316 (technical revision)
SEMI E54-0413 (designation update)
SEMI E54-0710 (designation update)
SEMI E54-0708 (designation update)
SEMI E54-1106 (designation update)
SEMI E54-0704 (technical revision)
SEMI E54-0997 (technical revision - replaces SEMI E65)
SEMI E54-1296 (technical revision)
SEMI E54-96 (first published)

SEMI E54.1-0316 (Reapproved 0124)
SEMI E54.1-0316 (technical revision)
SEMI E54.1-0708 (Reapproved 0413)
SEMI E54.1-0708 (technical revision)
SEMI E54.1-1000 (Reapproved 1106)
SEMI E54.1-1000 (technical revision)
SEMI E54.1-0299 (technical revision)
SEMI E54.1-0698 (technical revision)
SEMI E54.1-0298 (technical revision)
SEMI E54.1-0997 (first published - replaces SEMI E54)

SEMI E54.2-0316 (Reapproved 0124)
SEMI E54.2-0316 (technical revision)
SEMI E54.2-0698 (Reapproved 0710)
SEMI E54.2-0698 (Reapproved 0704)
SEMI E54.2-0698 (first published)