本文書は,共通および特定のデバイスネットワークが見ることのできる構造およびビヘイビア(挙動,振る舞い)をDeviceNetネットワークに表記的にマッピングして,SEMI準拠のSAN上にある知的デバイス間の通信を可能にする。
Referenced SEMI Standards
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device