NOTICE: This Document is no longer published with the SEMI
E54 suite of Standards. It is published and sold separately.
This Specification is part of a suite of Standards that
specify the implementation of SEMI Standards for the Sensor/Actuator Network.
The specific purpose of this Specification is to describe a network independent
application model comprised of device objects that are common to all endpoint
devices (EPD) on a semiconductor equipment Sensor/Actuator Communication Network.
An EPD is a device that measures and monitors process
characteristics to determine when a specific threshold or event has been
obtained usually to signal the completion of a process or process step. These
EPDs are, but not limited to, devices that may classify a process endpoint by
determining the size and count of particles in the process environment,
detecting, and determining optical light from a sample region of the
environment’s space, or determining motor current of an equipment component.
This Specification specifically addresses the minimum
attributes, services, and behavior an EPD must support to be interoperable on
the Sensor/Actuator Network.
This Specification is intended to ensure a high-degree of
device interoperability on the Sensor/Actuator Network, while still allowing
flexibility for product differentiation and technology evolution.
The model specified in this Specification is used in
conjunction with the Sensor/Actuator Network Common Device Model (CDM) to
completely describe the EPD as it appears from the network interface.
This Specification, together with the Sensor/Actuator
Network Standard, the Sensor/Actuator Network CDM, and a Sensor/Actuator
Network Communication Specification, form a complete interoperability specification
for the EPD.
To comply with this Specification, a device must implement
and support, at a minimum, the required attributes, services, and behavior
identified in these documents. Support for optional attributes, services and
behavior is not required to be compliant to this Specification. Optional
attributes, services, and behavior are specified in these documents to promote
further device interoperability as features evolve and are adopted by more
manufacturers. If optional attributes, services, and behavior are implemented
for this device they must be implemented as identified in this Specification.
Referenced SEMI Standards (purchase separately)
SEMI E39 — Specification for Object Services: Concepts,
Behavior, and Services
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network
Common Device Model
Revision History
SEMI E54.11-0316 (Reapproved 0721)
SEMI E54.11-0316 (technical revision)
SEMI E54.11-1106 (Reapproved 1211)
SEMI E54.11-1106 (technical revision)
SEMI E54.11-1105 (technical revision)
SEMI E54.11-0301 (first published)
