NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.
This Specification is part of the SEMI sensor/actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC-Link standard. This network communication standard (NCS) taken together with the SEMI SAN Standard suite and the CC-Link standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.
CC-Link is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.
This Document specifies a SAN communications standard based on the CC-Link specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.
In conjunction with a SEMI SAN common device model (CDM) specification and one or more SEMI specific device model (SDM) specifications (e.g., for a mass flow controller), this NCS with the related CC-Link standard describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.
Referenced SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior and Services
SEMI E54.1 — Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
