NOTICE: This Standard was balloted and approved for withdrawal in 2024.

This Specification defines a communication specification based on the ANSI/EIA/CEA 709.1 Control Networking Protocol (LonWorks) to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on semiconductor manufacturing equipment.

This Standard specifies a mapping of the SEMI Common Device Model (CDM) onto LonWorks technology using the LonMark interoperability guidelines established for LonWorks devices. The LonMark International Association will review and approve the enhanced SEMI LonMark functional profiles presented in this network communication Document and incorporate the required SEMI profiles into the LonMark Interoperability Guidelines.

Referenced SEMI Standards (purchase separately)
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Specific Device Model for an Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

Revision History
SEMI E54.16-1106 (Withdrawn 0524)
SEMI E54.16-1106 (Reapproved 1211)
SEMI E54.16-1106 (technical revision)
SEMI E54.16-0705 (first published - replaces SEMI E54.6)