NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.

This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this Specification is to describe a network-independent application model comprised of device objects which are common to all vacuum pump devices (VPD) on a semiconductor equipment Sensor/Actuator communications network.

This Specification for a vacuum pump device specifically addresses the minimum attributes, services, and behavior a VPD must support to be interoperable on the Sensor/Actuator communication network. This specification describes the VPD as a class of devices that include mechanical roughing pumps, turbo molecular pumps, cryogenic pumps and roughing pumps each with a booster. The attributes, services and behaviors described for the VPD are either required or optional for each pump type. Additional manufacturer specific attributes, services and behaviors unique to each pump type are not detailed in this Specification.

This Specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator communication network, while still allowing flexibility for product differentiation and technology evolution.

The VPD model specified in this specification is used in conjunction with the Sensor/Actuator network common device model (CDM) to completely describe the vacuum pump as it appears from the network interface.

This Specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network CDM, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the VPD.

To comply with this Specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in this Document. Support for optional attributes, services, and behavior are not required to be compliant to this Specification. Optional attributes, services, and behavior are specified in these Documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device, they must be implemented as identified in this Document.

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model