This provisional specification was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006. Originally published June 2000.

The purpose of this standard is to specify these interfaces and the interactions between MES and AMHS systems as a part of the CIM Framework. While the term AMHS is commonly used to refer to a wide range of equipment and systems that support automated material handling, the CIM Framework specifies a software component called "material transport and storage component (MTSC)" which represents the standard interface of the MES to the complete suite of AMHS capabilities.

SEMI E81 — Provisional Specification for CIM Framework Domain Architecture