NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global technical committee to enhance the usage of the Standard or Safety Guideline.

This Standard presents recommendations for content and usability of documentation provided by the equipment supplier to the equipment purchaser for acquisition and use of semiconductor, flat panel display (FPD), or other related manufacturing equipment. This Standard will support more effective equipment acquisition (e.g., purchase, lease) agreements between the equipment supplier and purchaser. Complete documentation can improve the purchaser’s ability to acquire, install, use, maintain, and repair the equipment, which increases productivity and reduces costs.

This Standard applies to all documentation provided by the equipment supplier to the equipment purchaser for new semiconductor, FPD, or other related manufacturing equipment and supplier-provided support equipment to cover aspects of equipment acquisition, installation, operation, maintenance, repair, and disposal.

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E33 — Guide for Semiconductor Manufacturing Electromagnetic Compatibility (EMC)

SEMI E36 — Semiconductor Equipment Manufacturing Information Tagging Specification

SEMI E70 — Guide for Tool Accommodation Process

SEMI E72 — Specification and Guide for 300 mm Equipment Footprint, Height, and Weight

SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services

SEMI E137 — Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment

SEMI E139 — Specification for Recipe and Parameter Management (RaP)

SEMI E150 — Guide for Equipment Training Best Practices

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S8 — Safety Guideline for Ergonomics Engineering for Semiconductor Manufacturing Equipment

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life

SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment