NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global technical committee to enhance the usage of the Standard or Safety Guideline.
The purpose of this Standard is to provide recommendations for developing and delivering equipment training so that it is performance-based. Performance-Based Equipment Training (PBET) improves the likelihood that the workforce of semiconductor equipment owners can successfully install, use, maintain, and repair their equipment. In so doing, PBET improves the equipment owner’s ability to attain reliability, availability, and maintainability (RAM) goals based on the metrics defined in SEMI E10. As such, PBET helps to increase productivity and reduce costs based on the metrics defined in SEMI E79 and SEMI E35, respectively.
This Standard applies to any company that must develop equipment training.
The Standard is applicable to training for anyone that works with equipment, including operators, maintenance technicians and engineers, service personnel, and applications/process technicians and engineers.
This Standard provides guidelines for both the process of developing and delivering equipment training that is performance-based, as well as the essential characteristics of the resulting PBET product.
This Standard does not preclude the use of Criterion-Referenced Instruction (CRI).
Referenced SEMI Standards
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SEMI E79 — Specification for Definition and Measurement of Equipment Productivity
SEMI E149 — Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
