The purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones.
 

The purpose of this Standard is to provide models which represent carrier logistics management status in equipment to exchange predictive carrier logistics information in order to facilitate better synchronization with the factory system.

This Standard defines a model which represents logistics management of a carrier in equipment as Carrier Logistics Job (CLJ). CLJ includes the following functionalities.
• State management of logistics management of a carrier
• Prediction management including submission, resubmission and withdrawal upon a change of predicted information such as time or load port assignment
• Carrier ID assignment
• Load port assignment
 

This Standard defines a model which represents management of multiple CLJs in equipment as Carrier Flow Job (CFJ). CFJ includes the following functionalities.
• Order management of CLJs per process order
• Prediction management of CLJs per carrier logistics order
• Carrier scheduling
• Load port scheduling including a queuing of multiple CLJs on one load port
• Load port arbitration to CLJs for Internal Buffer Equipment
 

This Standard covers specifications for services to and events from CLJ and CFJ models.
 

This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment.
 

This Standard covers compatibility with non-slot-integrity operation.

Subordinate Standards (included)
SEMI E171.1 — Specification for SECS-II Protocol for Predictive Carrier Logistics

Referenced SEMI Standards (purchase separately)
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E94 — Specification for Control Job Management

Revision History
SEMI E171-0524 (technical revision)
SEMI E171-0916 (technical revision)
SEMI E171-0216 (technical revision)
SEMI E171-1215 (technical revision)
SEMI E171-0515 (technical revision)
SEMI E171-0914 (first published)

SEMI E171.1-0524 (technical revision)
SEMI E171.1-0216 (technical revision)
SEMI E171.1-1215 (technical revision)
SEMI E171.1-0515 (first published)