This Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFC’s indicated and actual flow.

This Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order:
1. Ambient Temperature Effects (Steady State and Transient)
2. Gas Temperature Effects (Steady State and Transient)

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI F62-1123 (technical revision)
SEMI F62-1016 (technical revision)
SEMI F62-0701 (Reapproved 1111)
SEMI F62-0701 (Reapproved 0307)
SEMI F62-0701 (first published)