The purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions.

The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature.

The suggestions are specific to high purity silicon, single or poly crystal, covered by native oxide.

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI F79-0914 (Reapproved 0922)
SEMI F79-0914 (technical revision)
SEMI F79-0710 (complete rewrite)
SEMI F79-0703 (first published)