The purpose of this Guide is to document the industry acceptable compatibility of metallic materials with semiconductor process gases.

This Guide is applicable to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment. It is not applicable to high pressure, bulk delivery systems.

This Guide is specific to High Purity and Ultra-High Purity chemical delivery systems.

Referenced SEMI Standards (purchase separately)
SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications

Revision History
SEMI F105-0914 (Reapproved 0922)
SEMI F105-0914 (technical revision)
SEMI F105-0314 (technical revision)
SEMI F105-0708 (technical revision)
SEMI F105-1107 (first published)