G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials

G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials

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Revision:
SEMI G67-0996 (Reapproved 0318) - InactiveSEMI G67-0996 (Reapproved 0811) - SupersededSEMI G67-0996 (Reapproved 1104) - Superseded

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Description

 

NOTICE: This Document was reapproved with minor editorial changes.

 

This Test Method describes a procedure to measure particles on sheet materials.

 

The method described may be used for the measurement of particles on items such as:

• Leadframe Interleaves,

• Cleanroom Paper, and

• Packing Material.

 

The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection.

 

 

Referenced SEMI Standards

None.



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