NOTICE: This Document was reapproved with minor editorial changes.
This Test Method describes a procedure to measure particles on sheet materials.
The method described may be used for the measurement of particles on items such as:
• Leadframe Interleaves,
• Cleanroom Paper, and
• Packing Material.
The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection.
Referenced SEMI StandardsNone.