NOTICE: This Document contains material that has been balloted and approved by the Environmental, Health & Safety Global Technical Committee, but is not immediately effective. This material and the date on which it becomes effective are included in Delayed Revisions Sections 1, 2, 3, 4, 5, and 6. The provisions of this information are not an authoritative part of the Document until their effective dates. The main body of SEMI S2-0821 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may optionally be applied prior to the effective date, providing they do not conflict with portions of the authoritative version other than those that are to be revised or replaced as part of the deferred change, and are labeled accordingly. Material that is to be replaced by revisions that are not yet in effect is preceded by a NOTICE indicating its status.
 

This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.

Applicability — This Safety Guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.

Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this Safety Guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.

Referenced SEMI Standards (purchase separately)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S3 — Safety Guideline for Process Liquid Heating Systems
SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Revision History

SEMI S2-0821Ec (delayed revision)

SEMI S2-0821Eb (delayed revision)

SEMI S2-0821Ea (delayed revision)
SEMI S2-0821 (technical revision)
SEMI S2-0818Eb (delayed revision)
SEMI S2-0818Ea (delayed revision)
SEMI S2-0818E (editorial revision)
SEMI S2-0818 (technical revision)
SEMI S2-1016b (delayed revision)
SEMI S2-1016a (delayed revision)
SEMI S2-1016 (technical revision)
SEMI S2-0715a (delayed revision)
SEMI S2-0715 (technical revision)
SEMI S2-0712d (delayed revision)
SEMI S2-0712c (delayed revision)
SEMI S2-0712b (delayed revision)
SEMI S2-0712a (delayed revision)
SEMI S2-0712 (technical revision)
SEMI S2-0310e (delayed revision)
SEMI S2-0310d (delayed revision)
SEMI S2-0310c (delayed revision)
SEMI S2-0310b (delayed revision)
SEMI S2-0310a (delayed revision)
SEMI S2-0310 (technical revision)
SEMI S2-0709 (technical revision)
SEMI S2-0706e (delayed revision)
SEMI S2-0706d (delayed revision)
SEMI S2-0706c (delayed revision)
SEMI S2-0706b (delayed revision)
SEMI S2-0706a (delayed revision)
SEMI S2-0706E (editorial revision)
SEMI S2-0706 (technical revision)
SEMI S2-0703aE (editorial revision)
SEMI S2-0703a (delayed revision)
SEMI S2-0703 (technical revision)
SEMI S2-0303 (technical revision)
SEMI S2-1102 (technical revision)
SEMI S2-0302 (technical revision)
SEMI S2-0200E (editorial revision)
SEMI S2-0200 (complete rewrite)
SEMI S2-93A (technical revision)
SEMI S2-93 (technical revision)
SEMI S2-91 (first published)