本安全ガイドラインには次の項目が含まれる。
- 目的
- 範囲
- 制限
- 参照スタンダードおよび文書
- 用語
- 装置ユーザへの提供文書の一般的基準
- 装置固有の危険性
- 危険性エネルギーの制御手順
- 危険警告
- 作業固有の危険性
- 材料安全データシート（MSDS: Material Safety Data Sheet）
- 個人防護具（PPE: Personal Protective Equipment）
- 装置点検，消耗部品，保守
- トレーニングに関する要求事項
- 緊急時の連絡先と対応
Referenced SEMI Standards
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S14 — Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
SEMI S26 — Environmental Health, and Safety Guideline for FPD Manufacturing System
