This Safety Guideline is intended as a set of safety considerations for unmanned transport vehicle (UTV) system. UTV system is used to automate the movement of material within semiconductor or flat panel display (FPD) factories or laboratories. UTV system includes both floor traveling vehicle (FTV) system and overhead traveling vehicle (OTV) system.
This Safety Guideline applies to UTV and UTV system used in semiconductor or FPD manufacturing.
This Safety Guideline addresses both floor traveling and overhead traveling UTV and UTV system. FTV system includes automated guided vehicle (AGV) system and rail guided vehicle (RGV) system. OTV system includes overhead shuttle (OHS) system and overhead hoist transport (OHT) system.
Evaluations for conformance to this Document should be conducted on all UTV and UTV system including separate items such as rails, control panels, power panels, lifter of OHT or OHS from maintenance/service space, and any other type of equipment necessary for operation, maintenance or service of the UTVs.
Referenced SEMI Standards
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System
