本基準係在針對多雇主工作區以及工作區內某公司人員的工作危險會影響鄰近工作區其他公司人員之情形,為使用者支援的安全巡視方法建立標準。
本基準包括下列章節:
Referenced SEMI Standards
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S19 — Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
SEMI S21 — Safety Guideline for Worker Protection