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3D01700 - SEMI 3D17 - Specification for Reference Material for Bonded Wafer Stack Void Metrology
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3D01800 - SEMI 3D18 - Guide for Wafer Edge Trimming for 3DS-IC Process
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A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI)
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C01000 - SEMI C10 - Guide for Determination of Method Detection Limits
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C00100 - SEMI C1 - Guide for the Analysis of Liquid Chemicals
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C01400 - SEMI C14 - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
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C01500 - SEMI C15 - Test Method for ppm and ppb Humidity Standards
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C01800 - SEMI C18 - Specification for Acetic Acid
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C01900 - SEMI C19 - Specification for Acetone
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C02000 - SEMI C20 - Specification and Guide for Ammonium Fluoride 40%
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C02100 - SEMI C21 - Specification and Guide for Ammonium Hydroxide
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C02300 - SEMI C23 - Specification for Buffered Oxide Etchants
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C02400 - SEMI C24 - Specification for n-Butyl Acetate
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C02700 - SEMI C27 - Specification and Guide for Hydrochloric Acid
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C02800 - SEMI C28 - Specification and Guide for Hydrofluoric Acid
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C02900 - SEMI C29 - Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
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C00312 - SEMI C3.12 - Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
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C00320 - SEMI C3.20 - Specification for Helium (He), in Cylinders, 99.9995%
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