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C06200 - SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes
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C06300 - SEMI C63 - Specification for Organosilicate Precursors Used in Low K CVD Processes
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C06400 - SEMI C64 - SEMI Statistical Guidelines for Ship To Control
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C06500 - SEMI C65 - Guide for Trimethylsilane (3MS), 99.995% Quality
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C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality
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C06700 - SEMI C67 - Guide for Hafnium Amides
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C06800 - SEMI C68 - Guide for Zirconium Amides
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C06900 - SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets
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C0700 - SEMI C70 - Specification for Tungsten Hexafluoride
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C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)
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C07200 - SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA
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C07300 - SEMI C73 - Guide for Hafnium Chloride
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C07400 - SEMI C74 - Guide for Hafnium Tert-Butoxide
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C07500 - SEMI C75 - Guide for Tetrakis(Dimethylamino)Titanium
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C07600 - SEMI C76 - Guide for Zirconium Tert-Butoxide
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C07700 - SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
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C07800 - SEMI C78 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy
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C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
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