This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008. Originally published in 1995.
NOTICE: This Document was balloted and approved for withdrawal in 2008.
The SEMI Committee on Chemical Reagents began its efforts on etchants in 1979. With this publication, the Committee establishes definitions for three major types of etchant mixtures; mixed acid etchants, buffer oxide etchants, and phosphoric etchants. Specifications and analytical procedures are introduced for each type.
Etchants within all of the requirements can be described as "meeting SEMI Specifications."
Where an analytical procedure different from that provided is substituted by a supplier or user, the burden of proof is on said supplier or user to confirm the equivalency.
Referenced SEMI Standards
None.
