This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1997; previously published March 2005.

NOTICE: This document was balloted and approved for withdrawal in 2010.

To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification.

SEMI C1 — Specifications for Reagents