NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
This Specification provides the dimensional requirements
for plastic and metal wafer carriers used for the processing and handling of 3
in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related
information on, but not a specification for, 200 mm diameter wafer carriers.
This Specification has two classifications: General Usage
and Auto Transport Usage.
- General Usage is a basic guideline that covers 3 in., 100
mm, 125 mm, and 150 mm wafer sizes.
- Auto Transport Usage is intended to meet the in-use
requirements for the interface of wafer carriers with automated wafer
processing equipment. Auto Transport Usage covers the 125 mm wafer size.
There is some related information (of historical interest,
but not part of the requirements) on the 200 mm wafer size.
To meet these specifications, carriers must be manufactured
within the dimensional limits and be dimensionally stable within the
specification when used in accordance with manufacturers’ recommendations.
Referenced SEMI Standards (purchase separately)
None.
Revision History
SEMI E1-1110 (Reapproved 0816)
SEMI E1-1110 (technical revision)
SEMI E1-0310 (complete rewrite)
SEMI E1-0697 (Reapproved 1102)E (editorial revision)
SEMI E1-0697 (Reapproved 1102)
SEMI E1-0697 (technical revision)
SEMI E1-78 (first published)
