NOTICE: This Document was balloted and approved for
withdrawal in 2001.
It is widely felt that the requirements of buyers can be
standardized. The purpose of this guide is to provide standardized procedures
for the procurement and acceptance of minienvironments. It should assist the
buyer in producing a procurement specification by providing a comprehensive and
structured overview and checklists of all the parameters relating to
procurement of minienvironments.
In addition, it is intended to support and improve
communication and common agreement on minienvironment acquisitions between
seller and buyer. It may be used at various levels of detail appropriate to the
type of minienvironment involved.
Where appropriate, reference will be made to supporting
documents such as:
- International specifications
- National specifications
- Company specifications
This document defines and describes the major topics
normally included in procurement and acceptance of minienvironments. Use of the
document is expected to result in a rapid and concise agreement between seller and
buyer. It is emphasized that the document is a guide which, per definition
(SEMI International Standards Program - Editorial Guidelines) as "a series
of options or instructions intended in increase the awareness of the user to
available techniques in a given subject area and to provide information from
which subsequent evaluations and standardization can be derived. Guides are
based on a consensus of viewpoints and may or may not suggest a particular
course of action."
Referenced SEMI Standards (purchase separately)
SEMI E14 — Measurement of Particle Contamination Contributed
to the Product from the Process or Support Tool
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E45 — Test Method for the Determination of Inorganic
Contamination from Minienvironments
SEMI E46 — Specification for the Determination of Organic Contamination
from Minienvironments
SEMI E48 — Specification for SMIF Indexer Volume
Requirement
Revision History
SEMI E44-96 (Withdrawn 0301)
SEMI E44-96 (first published)
