NOTICE: This Standard was balloted and approved for withdrawal in 2024.

This Standard defines a communication specification based on the SafetyBUS p protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing equipment.

This Standard specifies the protocol and services that compliant intelligent devices shall support to exchange information over the SafetyBUS p semiconductor equipment sensor/actuator network.

This Standard specifies the utilization of the SafetyBUS p protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs), on a SafetyBUS p network.

This Standard is used in conjunction with a SEMI Standard SAN Common Device Model Specification, one or more SEMI Standard Specific Device Model (SDM) Specifications (e.g., for a mass flow device), the SafetyBUS p Object Communications Specification Reference Guide. Together, they describe the SafetyBUS p protocol, the externally visible data structures and behaviors of devices utilizing the SafetyBUS p networking capability in a SEMI compliant SAN system.

Referenced SEMI Standards (purchase separately)
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for an Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

Revision History
SEMI E54.15-1107 (Withdrawn 0524)
SEMI E54.15-1107 (technical revision)
SEMI E54.15-0706 (technical revision)
SEMI E54.15-0305 (first published)