NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

The purpose of this Document is to provide a standardized method to quantify the reproducibility and zero drift of a thermal mass flow controller (MFC).

The intent of this Document is not to suggest any specific testing program but to specify the test method to be used when testing for parameters that are covered by this method. The user might use this document to check significant performance characteristics, such as reproducibility and zero drift, under a set of closely controlled test conditions.

The significance of the accuracy calculations in this method is to allow an MFC user to transfer a process from one manufacturing tool to another and to exchange MFCs within a single manufacturing tool while maintaining process control.

This Document describes the conditions and procedures for testing the reproducibility and zero drift of thermal MFCs. Because of the generic nature of this document, not all test procedures apply to all types of MFCs.

This Document provides a common basis for communication between manufacturers and users.

Referenced SEMI Standards (purchase separately)

SEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller

Revision History

SEMI E69-0298 (Reapproved 0913)

SEMI E69-0298 (Reapproved 0309)

SEMI E69-0298 (Reapproved 1103)

SEMI E69-0298 (first published)