NOTICE: This Document was balloted and approved for withdrawal in 2003.

The purpose of this Specification is to identify the applicable ASTM tubing specification requirements and to define the special material chemical composition requirements for 316L stainless steel tubing which is to be used for general purpose applications in semiconductor manufacturing facilities.

This Specification covers grades of nominal-wall-thickness stainless steel tubing as designated in Table 1 of ASTM A269, for use in chemical (gas or liquid) distribution systems in semiconductor manufacturing facilities and in comparable research and development areas.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI F2-94 (Withdrawn 0703) (combined with SEMI F20-0704)

SEMI F2-94 (technical revision)

SEMI F2-94 (first published)