This Guide explains a procedure for the determination of the amount and angular distribution of optical scatter from an opaque surface. In particular it focuses on measurement of the BRDF, which is a convenient and well accepted means of expressing optical scatter levels for many purposes. Additional data presentation formats described in Related Information 1 have advantages for certain applications. Surface parameters can be calculated from optical scatter data when assumptions are made about model relationships. Some of these extrapolated parameters are described in Related Information 2.
Optical scatter from an opaque surface results from surface topography, surface contamination, and subsurface effects. It is the user’s responsibility to be certain that measured scatter levels are ascribed to the correct mechanism. Scatter from small amounts of contamination can easily dominate the scatter from a smooth surface. Likewise, subsurface effects may play a more important scatter role than typically realized when surfaces are super polished.
This Guide does not provide a method to extrapolate data for one wavelength from data for any other wavelength. Data taken at particular incident and scatter directions are not extrapolated to other directions. In other words, no wavelength or angle scaling is to be inferred from this Guide. Normally the user must make measurements at the wavelengths and angles of interest.
This Guide applies only to BRDF measurements on opaque samples. It does not apply to scatter from translucent or transparent materials. There are subtle complications, which affect measurement of translucent or transparent materials that are best addressed in separate standards.
The wavelengths for which this Guide applies include the ultraviolet, visible, and infrared regions. Difficulty in obtaining appropriate sources, detectors, and low scatter optics complicate its practical application at wavelengths less than about 0.25 µm. Diffraction effects that start to become important for wavelengths greater than 15 µm complicate its practical application at longer wavelengths. Diffraction effects can be properly dealt with in scatter measurements, but they are not discussed in this Guide.
Any experimental parameter is a possible variable. Parameters that remain constant during a measurement sequence are reported as header information for the tabular data set. Related Information 3 gives a suggested reporting format that is adaptable to varying any of the sample or system parameters.
This Guide applies to flat or curved samples of arbitrary shape. However, only a flat, circular sample is addressed in the discussion and examples. It is the user’s responsibility to define an appropriate sample coordinate system to specify the measurement location on the sample surface for samples that are not flat.
The apparatus and measurement procedure are generic, so that specific instruments are neither excluded nor implied in the use of this Guide.
Referenced SEMI Standards (purchase separately)
SEMI M20 — Practice for Establishing a Wafer Coordinate System
SEMI M59 — Terminology for Silicon Technology
SEMI MF1048 — Test Method for Measuring Reflective Total Integrated Scatter
SEMI MF1811 — Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
Revision History
SEMI ME1392-0116 (Reapproved 1023)
SEMI ME1392-0116 (technical revision)
SEMI ME1392-1109 (technical revision)
SEMI ME1392-0305 (technical revision)
SEMI ME1392-96 (Reapproved 2002) (first SEMI publication)
