This Guide covers procedures for measurement of the resistivity profile perpendicular to the surface of a silicon wafer of known orientation and type in any resistivity range for which there exist suitable standards. Polished, lapped, or ground surfaces may be used.
The procedures of this Guide can be used to profile through p-n junctions.
The procedures of this Guide may be used on epitaxial films, substrates, diffused layers, or ion-implanted layers, or any combination of these.
The procedures of this Guide are comparative in that the resistivity profile of an unknown specimen is determined by comparing its measured spreading resistance value with those of calibration standards of known resistivity. These calibration standards must have the same surface preparation, conductivity type, and crystallographic orientation as the unknown specimen.
Referenced SEMI Standards (purchase separately)
SEMI C28 — Specification and Guide for Hydrofluoric Acid
SEMI C29 — Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
SEMI C31 — Specification for Methanol
SEMI M59 — Terminology for Silicon Technology
SEMI MF26 — Test Method for Determining the Orientation of a Semiconductive Single Crystal
SEMI MF42 — Test Method for Conductivity Type of Extrinsic Semiconducting Materials
SEMI MF84 —Test Method for Measuring Resistivity of Silicon Wafers with an In-Line Four-Point Probe
SEMI MF374 — Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-Implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure
SEMI MF525 — Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe
SEMI MF674 — Practice for Preparing Silicon for Spreading Resistance Measurements
SEMI MF723 — Practice for Conversion Between Resistivity and Dopant or Carrier Density for Boron-Doped, Phosphorus-Doped, and Arsenic-Doped Silicon
SEMI MF1392 — Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe
Revision History
SEMI MF672-0412 (Reapproved 1023)
SEMI MF672-0412 (Reapproved 1018)
SEMI MF672-0412 (technical revision)
SEMI MF672-0307 (technical revision)
SEMI MF672-0706 (technical revision)
SEMI MF672-01 (first SEMI publication)
