M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 : Standards semi.org : Standards|Women|Men|Denim & Pants|Skin

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表

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M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表

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Model: 9504
Tags: Lang-Japanese StdDcs-Inactive StdTier-Tier0 StdTpc-Gallium Arsenide StdVol-Materials

Revision:

SEMI M15-0298 - Inactive

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Description: この資料は，鏡面半絶縁ガリウム砒素（GaAs）ウェーハの欠陥をタイプ別にその許容できる最大数を規定している。
　
Referenced SEMI Standards
None.
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